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Title: | Micro Electronic and Mechanical Systems |
Authors: | Kenichi Takahata |
Issue Date: | 2009 |
Publisher: | InTech |
Abstract: | This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters. |
link: | http://www.intechopen.com/books/micro-electronic-and-mechanical-systems |
Keywords: | Engineering; Electrical and Electronic Engineering |
ISBN: | 978-953-307-027-8 |
Theme: | 教科書-應用科學類 |
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