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dc.contributor.authorPaik, Ungyu
dc.contributor.authorPark, Jea-Gun
dc.date.accessioned2022-05-03T09:54:23Z-
dc.date.available2022-05-03T09:54:23Z-
dc.date.issued2009
dc.identifier.isbn9781420059113
dc.identifier.urihttp://localhost:8080/xmlui/handle/123456789/147960-
dc.language.isoeng
dc.publisherTaylor & Francis
dc.relation.isbasedon10.1201/9781420059137
dc.relation.urihttps://library.oapen.org/bitstream/20.500.12657/25193/1/1004898.pdf
dc.rights.uriCC BY-NC-ND (姓名標示-非商業性-禁止改作)
dc.sourceDOAB
dc.subject.classificationAgriculture (General)
dc.subject.otherPhilosophy
dc.titleNanoparticle Engineering for Chemical-Mechanical Planarization
dc.type電子教科書
dc.classification醫學類
Theme:教科書-應用科學類

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